Various configurations of pseudograded BeTe/ZnSe superlattices have been in
vestigated to form a nonalloyed contact onto nitrogen-doped p-type ZnSe lay
ers. Best results were obtained by using a fully N-doped superlattice with
a 20-ML-thick pseudoperiod and with the thickness of individual layers in t
he pseudoperiod varying by 1 ML steps. A specific contact resistance of 6 x
10(-2) Omega cm(2) has been measured for a ZnSe p-type doping level of 2 x
10(17) cm(-3). Truly perfect ohmic contact is obtained. (C) 1999 American
Institute of Physics. [S0003-6951(99)02147-6].