TiO2 nanoparticle film catalysts with different thicknesses were prepared b
y plasma-enhanced chemical vapor deposition(PECVD) method and the surfaces
were subsequently treated by TiCl4 or O-2 plasma. Two kinds of TiO2 films w
ith different surface properties were obtained. Their surface microstructur
es and energy levels of surface states were tested by AFM, XRD, SPS, The ph
otocatalytic activities of the catalysts were determined via photodegradati
on experiments of phenol. The results demonstrated that photocatalytic acti
vities of samples whose surface was treated by O-2 plasma were greater than
those treated by TiCl4 plasma. Moreover, photodegradation ratio of phenol
during the first hour catalyzed by 0. 17 mu m thickness TiO2 nanoparticle f
ilm was greater than other samples. Especially, the difference of photocata
lytic activities of TiO2 nanoparticle films treated by TiCl4 or O-2 plasma
was respectively explained by energy band theory.