A 2-MHz 6-kVA voltage-source inverter using low-profile MOSFET modules forlow-temperature plasma generators

This paper presents a 2-MHz 6-kVA voltage-source inverter for low-temperatu re plasma generators, A new MOSFET module referred to as a "mega pack"' is specially designed and fabricated for high-frequency high-power application s. It has a low-profile package equipped with four terminal plates, The mai n circuit consists of a single-phase fun-bridge inverter using the four new modules. The layout of the modules is characterized by two modules, which are placed back-to back with each other, forming a half bridge. Both device and circuit designs achieve great reduction of stray inductance in the mai n circuit. A prototype inverter shows stable operation around frequencies a s high as 2 MHz.