The de-adhesion of a thin film from a rigid substrate is studied. It is ass
umed, that a periodic array of micro-cracks exists along the film/substrate
interface. During formation, the film expands, while being constrained by
the substrate. This phenomenon leads to development of compressive stresses
. Then buckling may occur and cause crack growth either along the interface
or in the film towards the free surface. A finite element model has been d
eveloped, which simulates film buckling and subsequent interfacial crack gr
owth, based on film/substrate adhesive constitutive relations. These relati
ons have been motivated by atomistic calculations on bimaterial failure. Th
e model does not require any facture criterion. Interfacial work of separat
ion has a significant effect on damage growth ahead of the crack tip, along
the interface. Also, a critical remote compressive stress exists, at which
damage progresses without further loading of the film. The relation betwee
n the critical compressive stress for extensive damage and the interfacial
work of separation can be used in combination with experiments for the quan
titative characterization of the film/substrate interface.