Characterization of borophosphosilicate glass soot fabricated by flame hydrolysis deposition for silica-on-silicon device applications

The use of flame hydrolysis deposition (FHD) to fabricate porous silica gla ss soot in the B2O3-P2O5-SiO2 glass system (BPSG) is described for silica-o n-silicon device applications. The deposition conditions with a Si substrat e temperature (similar to 200 degrees C) and a flame temperature (1300-1500 degrees C) are appropriate to synthesize the SiO2 and P2O5-SiO2 non-crysta lline glass soot. However, further investigations for the B2O3-P2O5-SiO2 gl ass soot are needed to obtain complete amorphous phases. The densification process of porous silica glass soot in the three systems of SiO2, P2O5-SiO2 and B2O3-P2O5-SiO2 is also described to estimate the onset of sintering te mperature. The OH absorption measurements are performed to try to identify incorporation of hydroxyl contaminants in the systems of P2O5-SiO2 and B2O3 -P2O5-SiO2. (C) 1999 Kluwer Academic Publishers.