Effects of composition and temperature on gel-formed TiO2/SiO2 films

Structure and crystal grain size distribution along the thickness of TiO2/S iO2 thin films prepared by the sol-gel process under various heating temper atures were studied. The X-ray diffraction spectra indicated that the cryst alline forms of TiO2 in the film depend on the TiO2, content. The phase tra nsformation kinetics depend on the anatase particle size. X-ray grazing inc idence analyses indicated that the crystal size decreases along the thickne ss of the thin film. Increasing the heat-treatment temperature increased th e difference in crystal size along the depth of thin film. (C) 1999 Elsevie r Science B.V. All rights reserved.