The formation process of CuCl crystals has been studied in (3 MeV 6 x 10(16
) Cl2+ ions/cm(2) + 3 MeV 6 x 10(16) Cu2+ ions/cm(2))-implanted silica glas
s by X-ray absorption spectroscopy and secondary ion mass spectroscopy. It
was found from X-ray absorption spectroscopy that Cu atoms were mainly coor
dinated by oxygen atoms in as-implanted glass. Heat-treatment at 600 degree
s C caused the formation of Cu-Cl bonds and beat-treatment at 1000 degrees
C caused the formation of CuCl crystals in silica. It was deduced that the
migration of Cl atoms is a rate-determining step for the formation of CuCl
crystal, on the basis of the conventional precipitation model. (C) 1999 Els
evier Science B.V. All rights reserved.