Dynamic mixing deposition/implantation in a plasma immersion configuration

A surface layer consisting of titanium, nitrogen, and oxygen is implanted/d eposited onto SS304 stainless steel using dynamic mixing and plasma immersi on ion implantation. Titanium is introduced into a nitrogen glow discharge plasma from a metal are plasma source. Dynamic mixing is achieved via the c o-implantation of Ti ions with high charge states as well as nitrogen and o xygen ions in the plasma. The resulting surface layer possesses superior tr ibological properties and corrosion resistance. The observed improvement in the wear resistance is more than a factor of 10. The enhancement in the su rface properties is believed to be due to the synergistic effects of the co existence and dynamic mixing of titanium, nitrogen, and oxygen at the inter face. (C) 1999 American Vacuum Society. [S0734-2101(99)06006-6].