Study of CN films synthesized by facing target sputtering

CN films were made by a facing target sputtering system. X-ray diffraction, x-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy and Raman spectroscopy spectra were measured to investigate the structure a nd the binding state of the film. The films an amorphous and the N/C increa ses as the N-2 partial pressure increases and it reaches 0.46 when the N-2? pressure is 100%. The N incorporated C forms N-sp(2) C and N-sp(3) C mainl y and there is a small amount of C drop N. The incorporated N causes struct ural disorder of the C films and a reduction in the friction coefficient of the films. (C) 1999 American Vacuum Society. [S0734-2101(99)01206-3].