B. Zhou et al., Surface perturbation target for the Rayleigh-Taylor instability in inertial-confinement fusion experiments, J VAC SCI A, 17(6), 1999, pp. 3516-3520
A preparation process of a surface perturbation target was introduced in th
is article. Through laser interference and a nickel-electroplate process, s
inusoidal surface perturbation on the photoresist and nickel plate mold wit
h sinusoidal surface perturbation were obtained. We transferred sinusoidal
perturbation on brominated polystyrene foils by a spin-coating process. By
removing the brominated polystyrene foils from the nickel-plate mold, the b
rominated polystyrene sinusoidal surface perturbation target was obtained.
The transfer precision of the sinusoidal perturbation was measured by scann
ing electron microscopy. The measurements showed that the surface perturbat
ion was transferred precisely. The surface roughness on the surface perturb
ation target was about 15.0 nm, analyzed by an alpha-step apparatus. (C) 19
99 American Vacuum Society. [S0734-2101(99)04906-4].