Surface perturbation target for the Rayleigh-Taylor instability in inertial-confinement fusion experiments

Citation
B. Zhou et al., Surface perturbation target for the Rayleigh-Taylor instability in inertial-confinement fusion experiments, J VAC SCI A, 17(6), 1999, pp. 3516-3520
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
17
Issue
6
Year of publication
1999
Pages
3516 - 3520
Database
ISI
SICI code
0734-2101(199911/12)17:6<3516:SPTFTR>2.0.ZU;2-4
Abstract
A preparation process of a surface perturbation target was introduced in th is article. Through laser interference and a nickel-electroplate process, s inusoidal surface perturbation on the photoresist and nickel plate mold wit h sinusoidal surface perturbation were obtained. We transferred sinusoidal perturbation on brominated polystyrene foils by a spin-coating process. By removing the brominated polystyrene foils from the nickel-plate mold, the b rominated polystyrene sinusoidal surface perturbation target was obtained. The transfer precision of the sinusoidal perturbation was measured by scann ing electron microscopy. The measurements showed that the surface perturbat ion was transferred precisely. The surface roughness on the surface perturb ation target was about 15.0 nm, analyzed by an alpha-step apparatus. (C) 19 99 American Vacuum Society. [S0734-2101(99)04906-4].