Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: Consequences for the formation of re-deposited layers in fusion experiments
A. Von Keudell et al., Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: Consequences for the formation of re-deposited layers in fusion experiments, NUCL FUSION, 39(10), 1999, pp. 1451-1462
The surface loss probabilities of hydrocarbon radicals on the surface of am
orphous hydrogenated carbon (C:H) films are investigated by depositing film
s inside a cavity with walls made from silicon substrates. This cavity is e
xposed to a discharge using different hydrocarbon source gases, and particl
es from the plasma can enter the cavity through a slit. The surface loss pr
obability beta is determined by analysis of the deposition profile inside t
he cavity. This surface loss probability corresponds to the sum of the prob
abilities of effective sticking on the surface and of formation of a non-re
active volatile product via surface reactions. By comparing the deposition
profiles measured in CH4, C2H2 and C2H4 discharges one obtains for C2H radi
cals beta = 0.90 +/- 0.05 and for C2Hx>2 radicals beta = 0.35 +/- 0.1, wher
eas the surface reaction probability for CH3 is below 10(-2), as known from
the literature. The growth rate of C:H films is, therefore, very sensitive
to any contribution of C2Hx species in the impinging flux from a hydrocarb
on discharge. The very same growth precursors can be formed in a divertor p
lasma and should therefore dominate the formation of re-deposited layers. A
scenario for the occurrence of these re-deposited films in fusion experime
nts on the basis of typical divertor plasma and surface parameters is being
discussed. Strategies are proposed for prevention of these re-deposited la
yers and for their removal.