A general analytical and numerical technique for finding high-quality probe
-forming systems is proposed and developed. This optimisation procedure inc
ludes mathematical and physical modeling based on the matrizant method and
on the boundary element method, respectively.
The Separated Russian Quadruplet with electrostatic quadrupole lenses consi
sting of four copper rods as the microprobe focusing system is numerically
simulated. The influence of the rod diameter and the energy spread on the b
eam spot size is investigated for different emittances, (C) 1999 Elsevier S
cience B.V. All rights reserved.