A new high precision slit system has been developed for the nano beam facil
ity SNAKE (Supraleitendes Nanoskop fur Angewandte Kernphysikalische Experim
ente) which is under construction at the Munich tandem accelerator. Cylindr
ically strained germanium wafers with a bending radius of 50 mm are used as
optimized slit edges. High resolution and angle resolved energy distributi
ons of the transmitted protons were measured by means of a Q3D magnetic spe
ctrograph at incident energies of 20 MeV. The measurements revealed the exp
ected strong correlation between small angle scattering and energy loss pro
cesses at the slits. Within SNAKE's angular acceptance the ratio of particl
es suffering energy loss by interacting with the slit and particles not int
eracting with the slit is less than 0.6% even for aperture widths of 2 mu m
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