A flexible LabVIEW (TM)-based data acquisition and analysis system for scanning microscopy

A new data analysis system has been developed with computer-controlled beam and sample positioning, video sample imaging, multiple large solid angle d etectors for X-rays and gamma-rays, and surface barrier detectors for charg ed particles. The system uses the LabVIEW(TM) programming language allowing it to be easily ported between different computer operating systems. In th e present configuration, digital signal processors are directly interfaced to a SCSI CAMAC controller. However, the modular software design permits th e substitution of other hardware with LabVIEW-supported drivers. On-line di splays of histogram and two-dimensional elemental map images provide a user -friendly data acquisition interface. Subregions of the two-dimensional map s may be selected interactively for detailed analysis or for subsequent sca nning. Off-line data processing of archived data currently yields elemental maps, analyzed spectra and reconstructions of tomographic data. (C) 1999 P ublished by Elsevier Science B.V. All rights reserved.