High performance micromachined Sm2Co17 polymer bonded magnets

A new technique has been developed to fabricate thick permanent magnets in large batches with a remanence of up to 0.34 T and an energy product of ove r 22 kJ/m(3). To our knowledge, these are the best values reached in microm achined magnets. To illustrate the potential of this new technology, a new type of rotational speed microsensor has been fabricated. A 1 mVpp signal i s obtained at 0.25 mm from a gearwheel. (C) 1999 Elsevier Science S.A. All rights reserved.