The characteristics of point-heating excitation in silicon micro-mechanical resonators

A micro-mechanical resonator is fabricated on single-crystal silicon by mic ro-machining technology. The resonator is excited by a modulated laser beam with small beam size. Both theoretical analysis and experimental results i ndicate that the resonant amplitude is a function of the excited position i n the silicon cantilever. The optimum position is related to the resonant m ode. These results are extremely useful for the design of the micro-resonat ors. (C) 1999 Elsevier Science S.A. All rights reserved.