Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation

This paper presents design issues and a numerical model of a micromachined pump based on acoustic streaming in water. Influences of channel height, wa ve amplitude, and backpressure on the velocity profile and flow rate are in vestigated. Using these results, design rules for the acoustic micropump ar e derived. Thermal transport effects of the acoustic streaming are also dis cussed in order to integrate a thermal flow sensor into the pump or to appl y the pump for cooling purposes. (C) 1999 Elsevier Science S.A. All rights reserved.