We study the quantum wave transport in nanoscale field-effect transistors.
It has been shown that the tunneling effect between the source and the drai
n in an ultra-short channel transistor significantly degrades the control o
f the drain current by the gate. However, the tunneling effect is suppresse
d by reducing the depth of the source and drain junctions which is designat
ed to suppress the short-channel effects concerning the cut-off characteris
tics of the field-effect transistor. The reduced junction depth confines th
e carriers in the direction (gamma-direction) perpendicular to the transpor
t direction (x-direction). The matching of gamma-direction wavefunctions at
regional boundaries suppresses the tunneling effect and normal FET current
-voltage characteristics has been obtained, which explains theoretically th
e successful fabrication of nanoscale field-effect transistors. (C) 1999 Ac
ademic Press.