Jf. Damlencourt et al., High-quality fully relaxed In0.65Ga0.35As layers grown on InP using the paramorphic approach, APPL PHYS L, 75(23), 1999, pp. 3638-3640
Thin and thick fully relaxed In0.65Ga0.35As layers have been grown on InP s
ubstrates (0.81% misfit), with high structural and high optoelectronic qual
ity at an operating wavelength of similar to 2.0 mu m. Full relaxation is a
chieved, using the paramorphic approach, by growing the In0.65Ga0.35As laye
rs lattice matched to an InAs0.25P0.75 seed membrane of predetermined latti
ce parameter. The InAs0.25P0.75 layer was originally grown pseudomorphicall
y strained on the InP substrate before being separated and elastically rela
xed using surface micromachining. (C) 1999 American Institute of Physics. [
S0003-6951(99)03049-1].