We propose a new technique that is able to extract the small-signal equival
ent-circuit elements of high electron mobility transistors (HEMTs) without
causing any gate degradation. For the determination of extrinsic resistance
values, unlike other conventional techniques, the proposed technique does
not require an additional relationship for the resistances. For the extract
ion of extrinsic inductance values, the technique uses the R-estimate, whic
h is known to be more robust relative to the measurement errors than the co
mmonly used least-squares regression. Additionally, we suggest an improved
cold HEMT model that seems to be more general than conventional cold HEMT m
odels. With the use of the improved cold HEMT model, the proposed technique
extracts the extrinsic resistance and inductance values.