Estimation of the resolution limits in SEM for IC innternal voltage due toretarding microfields on the specimen surface

Authors
Pakhomova, IY Rau, EI Ryabova, GV Souvorinov, AV
Citation
Iy. Pakhomova et al., Estimation of the resolution limits in SEM for IC innternal voltage due toretarding microfields on the specimen surface, IAN FIZ, 63(7), 1999, pp. 1318-1324
Citations number
12
Categorie Soggetti
Physics
Journal title
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA
ISSN journal
03676765 → ACNP
Volume
63
Issue
7
Year of publication
1999
Pages
1318 - 1324
Database
ISI
SICI code
0367-6765(199907)63:7<1318:EOTRLI>2.0.ZU;2-F