A stable GaS passivating layer was deposited on GaAs using alpha-Ga2S3 powd
er as a single-source precursor. Both good crystal quality and clean GaS/Ga
As interface were achieved. Electron-energy-loss spectra showed that the su
lfide material has a band gap of 3.0 eV. The valence band discontinuity of
the heterostructure was determined to be 1.9 eV from a series of ultraviole
t photoelectron spectra with increasing deposition thickness. Al/GaS/GaAs m
etal-insulator-semiconductor structures exhibited typical high frequency ca
pacitor versus voltage (C-V) behavior with very small loop hysteresis. The
C-V curves showed no aging after 20 months. (C) 1999 American Institute of
Physics. [S0021-8979(99)00424-7].