e(31) piezoelectric constant measurement of lead zirconate titanate thin films

The piezoelectric constant e(31) measurement procedure is presented for spu ttered lead zirconate titanate (PZT) thin films deposited on silicon substr ates. With a simple cantilever used in the direct piezoelectric effect, it is possible to measure piezoelectric coefficients of unpoled and poled film s. We discuss the poling treatment effects; applied electric field amplitud e and duration on the piezoelectric response. We have registered a quasista tic piezoelectric hysteresis loop, and will show that the poling procedure can modify the symmetry of the hysteresis loop. The thin films were piezoel ectric in a virgin state, which causes the offset of the piezoelectric hyst eresis loops. The maximum remanent piezoelectric constant e(31) estimated f or sputtered PZT thin film is -4 C/m(2). (C) 1999 American Institute of Phy sics. [S0021-8979(99)00624-6].