C. Julien et al., Growth of V2O5 thin films by pulsed laser deposition and their applications in lithium microbatteries, MAT SCI E B, 65(3), 1999, pp. 170-176
Vanadium pentoxide thin films were obtained by pulsed-laser deposition onto
various substrates. The growth was performed at different oxygen pressures
and substrate temperatures. It is found that the films deposited on glass
are amorphous and exhibit a polycrystalline structure upon thermal treatmen
t as evidenced by X-ray diffraction and Raman scattering spectroscopy. The
films deposited onto silicon wafer have an excellent crystallinity when dep
osited at substrate temperatures of 300 degrees C and an oxygen pressure of
50 mTorr. V2O5 thin films obtained by this method were successfully used a
s a cathode materials in lithium microbatteries. Electrochemical measuremen
ts show a good cyclability of pulsed laser deposited films. (C) 1999 Elsevi
er Science S.A. All rights reserved.