Growth of V2O5 thin films by pulsed laser deposition and their applications in lithium microbatteries

Vanadium pentoxide thin films were obtained by pulsed-laser deposition onto various substrates. The growth was performed at different oxygen pressures and substrate temperatures. It is found that the films deposited on glass are amorphous and exhibit a polycrystalline structure upon thermal treatmen t as evidenced by X-ray diffraction and Raman scattering spectroscopy. The films deposited onto silicon wafer have an excellent crystallinity when dep osited at substrate temperatures of 300 degrees C and an oxygen pressure of 50 mTorr. V2O5 thin films obtained by this method were successfully used a s a cathode materials in lithium microbatteries. Electrochemical measuremen ts show a good cyclability of pulsed laser deposited films. (C) 1999 Elsevi er Science S.A. All rights reserved.