Study of the mass sensitivity of SH-APM sensors with Maple V

Citation
I. Esteban et al., Study of the mass sensitivity of SH-APM sensors with Maple V, SENS ACTU-A, 76(1-3), 1999, pp. 43-50
Citations number
8
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
76
Issue
1-3
Year of publication
1999
Pages
43 - 50
Database
ISI
SICI code
0924-4247(19990830)76:1-3<43:SOTMSO>2.0.ZU;2-5
Abstract
Shear horizontal acoustic plate mode (SH-APM) devices offer interesting pos sibilities to probe liquid or polymer physico-chemical properties. As many parameters can influence their sensitivity, our research on these sensors i nvolves modelling. This was based on the 'partial waves' method, and was ca rried out with the mathematical software Maple V. In this paper, we study t he mass sensitivity of SH-APModes, in the case of a quartz plate covered by a copper phthalocyanine (CuPC) layer. The influence of multiple parameters on the sensor sensitivity was evaluated: sensitive coating nature and thic kness, quartz plate thickness and crystallographic cut, transducer electrod e periodicity and mode order. The results of modelling are compared to avai lable experimental results (mainly the influence of an isotropic layer); an d also to the mass sensitivity of SAW devices. (C) 1999 Elsevier Science S. A. All rights reserved.