Dynamic simulation model for a vibrating fluid density sensor

A dynamic simulation model for a vibrating fluid density sensor is presente d. The model includes electrostatic excitation, two torsional and two bendi ng vibration modes of the double-loop structure and gas film damping. The d amping model is based on the solution of the linearized Reynolds equation f or rectangular surfaces. The model is constructed of lumped electrical equi valent circuit blocks and it can be simulated with a circuit analysis progr am in the frequency and time domains. Simulated and measured e-factors and frequency responses at atmospheric pressures are in good agreement. (C) 199 9 Elsevier Science S.A. All rights reserved.