Measurement of thermal conductivity and diffusivity of single and multilayer membranes

In this paper a new measurement technique for the characterization of therm al properties of single or multilayer thin film membranes is presented. The measurement technique is based on the combined usage of polysilicon (PS) h eating resistors and polysilicon-aluminum thermocouples used as thermal sen sors. To demonstrate its effectiveness this test structure is used to inves tigate the thermal conductivity and diffusivity of different materials depo sited as thin films. Previously measured low stress LPCVD SiN is used as a mechanical support and PS as well as PECVD SiO thin films are deposited on it and then characterized. DC, pulsed and harmonic investigation are perfor med and the experimental results obtained are, where comparison has been po ssible, in good agreement with previously published data. (C) 1999 Elsevier Science S.A. All rights reserved.