Ni-Ag thin films as strain-sensitive materials for piezoresistive sensors

Some results concerning the electrical, electromechanical and structural pr operties of Ni-x-Ag1-x (for x values between 0.35 and 0.50) thin films in v iew of their utilization for manufacturing pressure and force sensors are p resented. As compared to the well known Ni-Cu (constantan) alloys, which ar e widely used for these type of sensors, Ni-x-Ag1-x thin films exhibit gaug e factor values of the same order of magnitude, but they are much more corr osion resistant and adherent to the substrate. The influence of composition and post-deposition annealing on the electrical resistance, temperature co efficient of resistance and gauge factor of Ni-x-Ag1-x. thin films is discu ssed. (C) 1999 Elsevier Science S.A. All rights reserved.