Structuring of convex corners using a reoxidation process - application toa tuning fork resonator made from (110)-silicon

The present paper describes the formation of silicon microstructures with c onvex corners by using a reoxidation process instead of compensation patter ns. Reliably formed convex corners are obtained by a standard wet anisotrop ic etching technique for bulk micromachining. Using this technology, a tuni ng fork resonator has been fabricated. The resonant behaviour of the electr ostatically driven resonator has been determined experimentally. The result s are discussed and analyzed by FEM calculations. (C) 1999 Elsevier Science S.A. All rights reserved.