X-ray analysis of residual stresses in TiN coatings

Residual macrostresses are measured on samples having a surface layer compo sed of a steel substrate and a thin TiN coating. The surface of machine com ponents can be covered by a TIN layer for the purpose of increasing hardnes s and wear resistance. Various methods are used for the deposition of this layer. Among them there are: physical vapour deposition (PVD), like-ion pla ting. sputter ion plating, magnetron sputtering (MS): and chemical vapour d eposition. This article deals with the layers of TiN deposited on steel 120 50 using PVD-MS. The TIN layer is studied in connection with residual stres s distribution and the machining of the substrate surface. The substrate is machined by milling and then coated with a TiN layer. (C) 1999 Elsevier Sc ience S.A. All rights reserved.