Optical emission diagnostics of the linear magnetron sputtering discharge

Spectroscopic study of properties of plasma produced in a new type of d.c. planar magnetron sputtering system-linear magnetron, with a titanium cathod e and argon-nitrogen mixtures are presented here. High energy species (Ti, Ar, Ar+, N-2, N-2(+), TIN) have been identified in plasma. Optical emission spectroscopy data were obtained showing the effects of operating parameter s (pressure, current, argon percentage in Ar-N-2 gas mixture, axial positio n) on emission intensities of the species. In particular, the discharge cur rent dependence of the emission intensities have been determined. Electron excitation temperatures were calculated from argon and titanium atomic line s. The results were used to characterize the excitation and ionization proc esses as well as sputtering conditions in the linear magnetron sputtering d evice. (C) 1999 Elsevier Science S.A. All rights reserved.