BCN coatings on polymer substrates by plasma CVD at low temperature

An overview is given of the plasma-assisted techniques for coating ceramics on polymer substrates at low temperature. Deposition of boron carbon nitri de was carried out on polycarbonate substrates by a radio-frequency plasma- assisted chemical vapor deposition process using different metallo-organics as precursors. The films deposited were found to be stable and adherent un der ambient conditions. The chemical composition of the layers varied in a wide range. Nearly stoichiometric BCN layers, as well as films with a high carbon content, were obtained. The chemical bonding of boron, carbon and ni trogen was analyzed by X-ray photoelectron spectroscopy The deposited films have a high transparency (90%) in the ultraviolet-visible region. The tran smission depends on the layer thickness and on the precursor used. The coat ings have a hardness of up to 1500 HK0.005. (C) 1999 Elsevier Science S.A. All rights reserved.