Use of novel methods for the investigation of the boron distribution in CVD diamond

Previous work on boron-doped CVD diamond films has indicated inhomogeneity of boron distribution. A variety of methods has been used to investigate th e nature of these inhomogeneities. The methods used include electron irradi ation in a transmission electron microscope followed by helium cooled micro scopic photoluminescence studies, imaging SIMS and micro-Raman imaging. A n umber of sharp B-related photoluminescence lines has been identified and fo und to vary considerably from one location to another. This evidence of inh omogeneity is confirmed by B mapping using imaging SIMS and micro-Raman mic roscopy. (C) 1999 Acta Metallurgica Inc. Published by Elsevier Science Ltd. All rights reserved.