PREPARATION OF LA0.5LI0.5TIO3 PEROVSKITE THIN-FILMS BY THE SOL-GEL METHOD

Perovskite La0.5Li0.5TiO3 (LLT) thin films, 0.2-1 mu m thick, were dep osited on non-alkali aluminoborosilicate glass substrates (NA substrat es) and glass substrates with ITO (indium tin oxide) coatings (ITO sub strates) by the sol-gel method. Alkoxide-based solutions containing ti tanium alkoxide, lithium alkoxide and lanthanum alkoxide and acetate-b ased solutions containing titanium alkoxide, lithium acetate anti lant hanum acetate, were used as coating solutions. Impurity phases tended to be precipitated on heat treatment in the films derived from the ace tate-based solutions. Addition of acetylacetone or partial substitutio n of lead for lithium in the acetate-based solutions, however, was eff ective in suppressing the precipitation of impurity phases. Preferred orientation of the LLT (111/2) plane was observed in the films prepare d from the acetate-based solutions when NA substrates were used, where as the employment of the alkoxide-based solutions or ITO substrates an d the partial substitution of lead for lithium, I educed the preferred orientation. The electrical conductivity of the films was much lower than the values reported for the sintered materials.