Spatio-temporal imaging of voltage pulses with a laser-gated photoconductive sampling probe

We report on the fabrication process of a scanning force microscopy (SFM) c antilever probe suitable for the investigation of ultrafast transient signa ls in microwave integrated circuits. High temporal resolution is achieved b y integrating a laser-gated photoconductive switch within a coplanar wavegu ide structure onto a low-temperature GaAs cantilever. This is demonstrated by temporal and spatio-temporal measurements performed on a coplanar strip line.