We present the results of the five mid-IR 15 mu m (12-18 mu m LW3 band) ISO
CAM Guaranteed Time Extragalactic Surveys performed in the regions of the L
ockman Hole and Marano Field. The roughly 1000 sources detected, 600 of whi
ch have a flux above the 80% completeness limit, guarantee a very high stat
istical significance for the integral and differential source counts from 0
.1 mJy up to similar to 5 mJy. By adding the ISOCAM surveys of the HDF-Nort
h and South (plus flanking fields) and the lensing cluster A2390 at low flu
xes and IRAS at high fluxes, we cover four decades in fur from 50 mu Jy to
similar to 0.3 Jy. The slope of the differential counts is very steep (alph
a = -3.0) in the flux range 0.4-4 mJy, hence much above the Euclidean expec
tation of alpha = -2.5. When compared with no-evolution models based on IRA
S, our counts show a factor similar to 10 excess at 400 mu Jy, and a fast c
onvergence, with alpha = -1.6 at lower fluxes.