Kinetic features for the initial stages of interaction of oxygen plasma with the Kapton H polyimide surface

The mass spectroscopic procedure of determining the formation rates of gase ous products of the interaction between plasma species and the surface of p olymeric materials is devised. The technique makes it possible to determine the reaction rates at the stages of the initiation of discharge until the attainment of its stationary parameters. The results of kinetic measurement s of the oxygen plasma treatment of the Kapton-H polyimide at a discharge c urrent of 80 mA and a pressure of 50 Pa are reported. The data obtained all ow new hypotheses about the initiation stages of plasma etching to be devis ed.