The dynamic response analysis of a pyroelectric thin-film infrared sensor with thermal isolation improvement structure

Both thoretical and experimental studies of the substrate effect on the the rmal behavior of a PbTiO3 infrared (IR) sensor have been reported. With act ive cantilever dimensions of 200 x 100 x 5 mu m(3) formed by etching proces ses, the pyroelectric micro-electro-mechanical system (pyro/MEMS) structure exhibits a much superior performance to that of a traditional IR-sensing b ulk structure under the 800-mu W incident optical light with wavelength of 970 nm, Two-order improvement in current responsivity is obtained for the p yro/MEMS structure. This shows the substrate effect on the performance of a pyro/MEMS IR sensor is very significant. A simple model has also been prop osed to illustrate the substrate effect more comprehensively.