Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers

Citation
A. Bozkurt et al., Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers, IEEE ULTRAS, 46(6), 1999, pp. 1364-1374
Citations number
24
Categorie Soggetti
Optics & Acoustics
Journal title
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
ISSN journal
08853010 → ACNP
Volume
46
Issue
6
Year of publication
1999
Pages
1364 - 1374
Database
ISI
SICI code
0885-3010(199911)46:6<1364:TAAOES>2.0.ZU;2-X
Abstract
Theoretical analysis and computer simulations of capacitive microfabricated ultrasonic transducers indicate that device performance can be optimized t hrough judicious patterning of electrodes. The conceptual basis of the anal ysis is that electrostatic force should be applied only where it is most ef fective, such as at the center of a circular membrane. If breakdown mechani sms are ignored, an infinitesimally small electrode with an infinite bias v oltage results in the optimal transducer, A more realistic design example c ompares the 3-dB bandwidths of a fully metalized transducer and a partially metalized transducer, each tuned with a lossless Butterworth network. It i s found that the bandwidth of the optimally metalized device is twice that of the fully metalized device.