Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

Citation
O. Oralkan et al., Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element, IEEE ULTRAS, 46(6), 1999, pp. 1337-1340
Citations number
7
Categorie Soggetti
Optics & Acoustics
Journal title
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
ISSN journal
08853010 → ACNP
Volume
46
Issue
6
Year of publication
1999
Pages
1337 - 1340
Database
ISI
SICI code
0885-3010(199911)46:6<1337:SAECOA>2.0.ZU;2-5
Abstract
In this letter, a 400-mu m x 400-mu m 2-D capacitive micromachined ultrason ic transducer (cMUT) array element is experimentally characterized, and the results are found to be in good agreement with theoretical predictions. As a receiver, the transducer has a 1.8 X 10(-7) nm/root Hz displacement sens itivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure a t the transducer surface at 3 MHz. The transducer also has more than 100% f ractional bandwidth around 3 MHz, which makes it suitable for ultrasound im aging.