A theoretical and experimental study on multi-mode air damping of SiO2-Au c
omposite cantilever beams is presented. Calculation of the resonant frequen
cies is effected by taking into account the effect of the coated gold layer
. Theoretical values agree well with the experimental results up to the thi
rd mode. Quality factors are computed using two different models, the first
one is based on the equivalent sphere model and the second one uses hydrod
ynamic functions. For both models, the theoretical results show a very good
agreement with experimental ones for the first two modes.