A microcantilever stylus offers various possibilities as a high-sensitivity
chemical sensor. For high sensitivity, the cantilever stylus should have a
very sharp tip, a low force constant; and a high mechanical frequency. In
this work, a technique for sensing thermal reaction using a bimetallic Si3N
4 microcantilever is investigated. The temperature change and heat loss of
the bimetallic cantilever will lead to an angular bending of the bimetallic
lever. Its thermal response was qualitatively examined during an endotherm
ic chemical reaction using the optical deflection method. The chemical subs
tance used in this experiment is tetradecanol, CH3(CH2)(13)OH, with the kno
wn phase transition temperature of 313 K.