Ion beam mixing of Fe with alumina: RBS studies

We have studied ion beam mixing of Fe with alumina and Al using different m asses of the ions (Ne+, Ar+), different fluences (5 x 10(15) to 2 x 10(17) ions/cm(2)) and different temperatures (RT, 423 and 573 K). Fe thin films o f different thicknesses ranging from 20 to 50 nm were deposited by a therma l evaporation method. The ion energy was chosen from 30 to 110 keV such tha t Fd is maximum at the interface. All the specimens were analysed with RES technique. It is found that the square of the diffusion length Dt of Fe in alumina is proportional to the ion fluence implying that mixing is due to b allistic effects (i.e., cascade mixing). Comparison of Dts shows that mixin g is less in alumina than in Al, The decrease in Dt with increase in irradi ation temperature for the same energy and ion fluence imply de-mixing of Fe from alumina. Annealing of the irradiated samples also show de-mixing. (C) 1999 Elsevier Science B.V. All rights reserved.