Miniaturized time-scanning Fourier transform spectrometer based on silicontechnology

We present a miniaturized Fourier transform spectrometer (FTS) based on opt ical microelectromechanical system technology. The FTS is a Michelson inter ferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving s ystem of +/-0.5 mu m for a displacement of 38.5 mu m. A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reprod ucibility is +/-25 nm. The measured resolution of the spectrometer after th e phase correction is 6 nm at a wavelength of 633 nm. (C) 1999 Optical Soci ety of America.