It is shown that it is possible to synthesize thin films of the II3-V-2 com
pound Zn3As2 by the heterovalent exchange reaction (HER) of dimethylzinc in
H-2 with GaAs substrates at 350 degrees C. These films are of a very high
structural quality, being both epitaxial and highly ordered in nature as sh
own by an extensive transmission electron microscopy study. Using compariso
ns with simulated images and diffraction patterns, it is shown that the Zn3
As2 formed is of the low-temperature cu phase, which is stable below about
190 degrees C. The lack of free gallium present on the surface suggests tha
t methyl radicals are responsible for transport of exchanged gallium into t
he vapour phase. The high structural quality of the layers grown by this te
chnique suggests that the HER is a promising method of circumventing the us
ual problems of mismatched epitaxial growth and that a wide range of thin-f
ilm materials may possibly be grown.