M. Putero et al., Experimental and theoretical study of misfit dislocation development in low-mismatched heterostructures: application to GaAs/Ge, PHIL MAG A, 79(11), 1999, pp. 2711-2724
The metastability of thin epitaxial layers on very-high-quality substrates
is usual in semiconductor systems. A numerical study of the first relaxatio
n stage in low-misfit heterostructures is proposed and applied to the GaAs/
Ge system. It is shown that growth conditions as well as cooling conditions
are essential in determining the final state and the relaxation rate at am
bient conditions.