We have grown cubic GaN on GaAs(001) substrates by MOCVD using a double ste
p process with a buffer deposition at 400 degrees C. The purpose of the buf
fer deposited at very low temperature is to prevent GaAs decomposition at g
rowth temperature. We have focused on the effect of the NH3/TEGa molar rati
o on the growth of this metastable phase. We have assessed the crystalline
quality using X-ray diffraction in the theta-2 theta mode, and have used lo
w temperature (2 K) PL for evaluating the optical properties of the GaN fil
ms. We found an optimum V/III ratio of 1250 at the growth temperature of 80
0 degrees C.