MOCVD growth of cubic gallium nitride: Effect of V/III ratio

Citation
M. Moret et al., MOCVD growth of cubic gallium nitride: Effect of V/III ratio, PHYS ST S-A, 176(1), 1999, pp. 493-496
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
ISSN journal
00318965 → ACNP
Volume
176
Issue
1
Year of publication
1999
Pages
493 - 496
Database
ISI
SICI code
0031-8965(19991116)176:1<493:MGOCGN>2.0.ZU;2-W
Abstract
We have grown cubic GaN on GaAs(001) substrates by MOCVD using a double ste p process with a buffer deposition at 400 degrees C. The purpose of the buf fer deposited at very low temperature is to prevent GaAs decomposition at g rowth temperature. We have focused on the effect of the NH3/TEGa molar rati o on the growth of this metastable phase. We have assessed the crystalline quality using X-ray diffraction in the theta-2 theta mode, and have used lo w temperature (2 K) PL for evaluating the optical properties of the GaN fil ms. We found an optimum V/III ratio of 1250 at the growth temperature of 80 0 degrees C.