Oxidation behavior of diamond-like carbon films

Citation
Dy. Wang et al., Oxidation behavior of diamond-like carbon films, SURF COAT, 121, 1999, pp. 138-144
Citations number
19
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
02578972 → ACNP
Volume
121
Year of publication
1999
Pages
138 - 144
Database
ISI
SICI code
0257-8972(199911)121:<138:OBODCF>2.0.ZU;2-0
Abstract
Diamond-like carbon (DLC) films were synthesized by a combined PVD and PECV D process to produce a multilayered structure consisting of a Ti interlayer , a graded transition layer, and the carbon film. The oxidation behavior of DLC films was investigated using thermogravimetric (TGA) and differential thermal analyses (DTA). The phase identification and microstructural examin ations were conducted by XRD, Raman and SEM/EDS. According to those results , DLC films disintegrated at 350 degrees C, showing typical graphitic trans formation and oxidation behavior. The weight loss as a result of oxidation of carbon followed a linear reaction rate of -2.3 x 10(-4) g/min cm(2). At 450 degrees C, oxidation of the underlying TiN/TiCxNy interlayer occurred i n addition to the oxidation of DLC. Weight gain caused by the formation of TiO2 was observed. The overall oxidation kinetics of DLC is close to a para bolic behavior with k(p)=5.48 x 10(-5) mg(2)/cm(4) h. Surface cracking of t he film resulted from stress relief. The microhardness of DLC films decreas ed with increasing annealing temperature due to the graphitization and oxid ation of DLC. The transition temperature was confirmed using the results fr om the Raman analysis. (C) 1999 Elsevier Science S.A. All rights reserved.