The interdiffusion of carbon and titanium between a substrate and coating d
uring chemical vapor deposition (CVD) coating of steels influences the micr
ostructures and properties of the coating/substrate compounds. The CVD para
meters atmosphere, temperature and pressure as well as the composition of t
he steel substrates were investigated systematically to optimize the proper
ties of the coating/substrate compounds. The tool and carbon steels AISI H1
3 (DIN X40CrMoV5-1), AISI A2 (DIN X100CrMoV5-1). AISI 1045 (DIN Ck45) and s
imilar to AISI 1095 (DIN 100V1) were coated by high-temperature CVD TiN, lo
w pressure CVD TiN and moderate-temperature CVD TiCN. Chemical compositions
of coatings and substrates were measured by glow discharge optical spectro
scopy (GDOS) and electron probe microanalysis (EPMA). Substrate and coating
microstructures were examined in taper sections by light microscopy. Furth
er, the substrate hardness was investigated in the taper sections. In an ea
rlier work, carbon diffusion near the interface was investigated. Low coati
ng pressures combined with high temperatures and high carbon activities of
the substrates promoted the diffusion process. In this work, the investigat
ions were extended to deeper substrate regions and to the titanium diffusio
n. From the carbon profiles in coatings and substrates, a carbon balance wa
s set up for the diffusion from the substrate to the coating during CVD. (C
) 1999 Elsevier Science S.A. All rights reserved.