Solid lubricant coatings for vacuum and space mechanisms are widely used wh
en conventional liquid lubrication is prohibited, either when the operating
conditions become too severe (extreme temperatures, ultrahigh vacuum) or w
hen a clean environment is required. While the well-known MoS2 lamellar sol
id lubricant is the most extensively used material today, diamond-like carb
on (DLC) coatings are studied as potential candidates for a wear resistant
material with low friction in vacuum conditions. Diamondlike carbon-based f
unctionally gradient Ti/a-CH(Ti) films have been deposited by the hybrid te
chnique of magnetron sputtering and d.c. plasma-enhanced chemical vapor dep
osition, in various conditions. Analytical characterization coupled with tr
ibological tests in ultrahigh vacuum and ambient humid air have been perfor
med to identify relationships between the deposition conditions, the compos
ition and the properties (stress, friction) of the films. Depending on the
properties of the DLC which are in turn dependent on the deposition procedu
re, the investigated films present a wide range of tribological behavior, i
ncluding friction coefficients in UHV below 0.02. Typical DLC structures an
d compositions allowing the achievement of extremely low friction in vacuum
and good behavior tinder air are identified and discussed. (C) 1999 Elsevi
er Science S.A. All rights reserved.